Electrical connection through motor housing

ABSTRACT

An apparatus including a motor housing which includes a plurality of electrical connector apertures through the motor housing; a plurality of first electrical connectors which include a projecting pin section; a plurality of second electrical connectors which include a socket section configured to receive a respective projecting pin section; and a casing configured to press the first electrical connectors against respective seals at the electrical connector apertures to seal the electrical connector apertures. The first electrical connectors project through the respective seals. The projecting pin sections are located in the respective socket sections of the second electrical connectors with a press-fit therebetween to thereby connect the first and second electrical connectors.

CROSS REFERENCE TO RELATED APPLICATIONS

This is a divisional patent application of copending U.S. applicationSer. No. 13/744,900 filed Jan. 18, 2013, which is a divisional patentapplication of U.S. application Ser. No. 13/618,315 filed Sep. 14, 2012,which claims priority under 35 USC 119(e) on Provisional PatentApplication No. 61/627,030 filed Sep. 16, 2011 and Provisional PatentApplication No. 61/683,297 filed Aug. 15, 2012, which are herebyincorporated by reference in their entireties.

BACKGROUND Technical Field

The exemplary and non-limiting embodiments relate generally to a robotdrive and, more particularly, to an electrical connection through amotor housing.

Brief Description of Prior Developments

Conventional manufacturing technologies for semiconductor integratedcircuits and flat panel displays often include processing of siliconwafers and glass panels, often referred to as substrates, in fullyautomated cluster tools. A typical cluster tool may include a vacuumchamber with load locks and process modules. The tool is typicallyserviced by a robotic manipulator (robot or substrate transportapparatus) which cycles the substrates from the load locks, through theprocess modules, and back to the load locks. Another robot may belocated in an atmospheric transfer module which serves as an interfacebetween the load locks of the vacuum chamber and standardized load portsserviced by an external transportation system.

SUMMARY

The following summary is merely intended to be exemplary. The summary isnot intended to limit the scope of the claims.

In accordance with one aspect, an example embodiment, an apparatus isprovided comprising a motor housing configured to form a firstenvironmental area inside the motor housing separated from a secondenvironmental area outside of the motor housing, where the motor housingcomprises electrical connector apertures through the motor housing; aplurality of first electrical connectors, where each of the firstelectrical connectors comprise a projecting pin section; a plurality ofsecond electrical connectors, where each of the second electricalconnectors comprise a socket section configured to receive theprojecting pin section of a respective one of the first electricalconnectors; and a casing configured to mount to the motor housing, wherethe casing is configured to press the first electrical connectors or thesecond electrical connectors against respective seals at respective onesof the electrical connector apertures to seal the electrical connectorapertures, where the first electrical connectors contact the respectiveseals and project through the respective seals, where the projecting pinsections of the first electrical connectors are located in the socketsections of the second electrical connectors forming an interference fittherebetween to thereby connect the first and second electricalconnectors.

In accordance with another aspect, an example embodiment is provided inan apparatus comprising a motor housing configured to form a firstenvironmental area inside the motor housing separated from a secondenvironmental area outside of the motor housing, where the motor housingcomprises a plurality of electrical connector apertures through themotor housing; a plurality of first electrical connectors, where each ofthe first electrical connectors comprise a projecting pin section; aplurality of second electrical connectors, where each of the secondelectrical connectors comprise a socket section configured to receivethe projecting pin section of a respective one of the first electricalconnectors; and a casing configured to press the first electricalconnectors against respective seals at the electrical connectorapertures to seal the electrical connector apertures, where the firstelectrical connectors project through the respective seals, where theprojecting pin sections of the first electrical connectors are locatedin the respective socket sections of the second electrical connectorswith a press-fit therebetween to thereby connect the first and secondelectrical connectors.

In accordance with another aspect, an example method comprises insertingfirst electrical connectors into electrical connector apertures in amotor housing; pressing projecting pin sections of the first electricalconnectors into socket sections of respective second electricalconnectors at the electrical connector apertures, where the secondelectrical connectors are located at least partially in the electricalconnector apertures, and where the projecting pin sections form aninterference fit connection with the respective socket sections of thesecond electrical connectors to thereby electrically connect the firstand second electrical connectors; pressing at least one group of eitherthe first electrical connectors or the second electrical connectorstowards the motor housing by a casing to thereby press the electricalconnectors of the at least one group against respective seals in theelectrical connector apertures, where the seals are located in sealreceiving pockets of the electrical connector apertures, where the sealsare compressed between the at least one group of electrical connectorsand the motor housing to seal the electrical connector apertures.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features are explained in the followingdescription, taken in connection with the accompanying drawings,wherein:

FIG. 1 is a schematic sectional view of an example apparatus;

FIG. 2 is a schematic view of a feed-through;

FIG. 3A is a schematic view of another feed-through;

FIG. 3B is a schematic view of another feed-through;

FIG. 3C is a schematic view of another feed-through;

FIG. 3D is a schematic view of another feed-through;

FIG. 4 is a schematic view of a read-head connected to a housing;

FIG. 5 is a schematic view of another example of the read-head connectedto the housing;

FIG. 6 is a schematic view of another example of the read-head connectedto the housing;

FIG. 7 is a schematic view of another example of the read-head connectedto the housing;

FIGS. 8 and 9 are schematic views of another example of the read-headconnected to the housing;

FIGS. 10 and 11 are schematic views of another example of the read-headconnected to the housing;

FIGS. 12-19 are schematic view of various separation wallconfigurations;

FIGS. 20-23 are schematic views of various stator and rotor combinationswith stator encapsulation;

FIG. 24 illustrates a motor having a radial field arrangement;

FIG. 25 illustrates a hybrid motor design having a toothed passiverotor, a stator phase A and stator phase B separated by ring permanentmagnet;

FIG. 26 illustrates a motor having an axial field design;

FIG. 27 illustrates a motor having a brushless design with a passiverotor;

FIGS. 28-29 illustrate a motor with a toothed passive rotor;

FIGS. 30-31 illustrate a motor with a toothed passive rotor;

FIGS. 32-33 illustrate a motor with a toothed passive rotor;

FIGS. 34-35 illustrate a motor with a toothed passive rotor; and

FIGS. 36-37 illustrate a motor with a toothed passive rotor.

DETAILED DESCRIPTION OF EMBODIMENTS

Referring to FIG. 1, there is shown a schematic view of a robot drive 10of a substrate transport apparatus 2. Although the robot drive 10 isdescribed with respect to a vacuum robot, any suitable robot drive(atmospheric or otherwise) may be provided having features as disclosed.Drive 10 may incorporate features as previously disclosed or asdisclosed herein. Aside from the preferred embodiment or embodimentsdisclosed, this invention is capable of other embodiments and of beingpracticed or being carried out in various ways. Thus, it is to beunderstood that the invention is not limited in its application to thedetails of construction and the arrangements of components set forth inthe following description or illustrated in the drawings. If only oneembodiment is described herein, the claims hereof are not to be limitedto that embodiment. Moreover, the claims hereof are not to be readrestrictively unless there is clear and convincing evidence manifestinga certain exclusion, restriction, or disclaimer.

An example robotic manipulator or apparatus 2 incorporating thevacuum-compatible direct-drive system of one or more embodiments of thisinvention is shown in FIG. 1. The robotic manipulator may be builtaround frame 101, e.g., an aluminum extrusion, suspended from flange ormounting arrangement 102. Alternatively, the mounting arrangement may beon the side of frame 101, at the bottom of frame 101 or frame 101 may bemounted in any other suitable manner. Frame 101 may incorporate one ormore vertical rail 103 with linear bearings 104 to provide guidance tohousing 105 driven by motor 106 via ball-screw mechanism 107. Only onerail 103 is shown for simplicity. Alternatively, motor housing 105 maybe driven by a linear motor, attached directly to frame 101 or coupledto frame 101 in any other suitable movable or unmovable manner. Motorhousing 105 may incorporate one, two, three, four or more direct-drivemodules as will be described in greater detail below. Housing 105 mayhouse motors 108, 109 equipped with position encoders 110 and 111.Housing 105 is shown as an exemplary structure where housing 105 mayhave portions configured with respect to motors 108, 109 and positionencoders 110 and 111 as will be described in greater detail below.Bellows 120 may be used to accommodate motion of motors 105 alongvertical rail(s) 103, separating the environment where movablecomponents of motors 108, 109 and encoders 110, 111 operate, forinstance vacuum, from the outside environment, for example, atmosphere.

In the example of FIG. 1, two direct-drive modules, each having onemotor and one encoder, are shown. However, any suitable number ofdirect-drive modules with any suitable number of motors and encoders maybe used. Inverted service loop 222 may be utilized to supply power tothe direct-drive module(s) and facilitate signaling between thedirect-drive module(s) and other components of the robotic system, suchas a controller 224, as shown in FIG. 1. Alternatively, a regular,non-inverted service loop 226 may be employed. As shown in FIG. 1, uppermotor 108 may drive hollow outer shaft 112 connected to first link 114of the robot arm. Lower motor 109 may be connected to coaxial innershaft 113 which may be coupled via belt drive 115 to second link 116.Another belt arrangement 117 may be employed to maintain radialorientation of third link 118 regardless of the position of the firsttwo links 114 and 116. This may be achieved due to a 1:2 ratio betweenthe pulley incorporated into the first link and the pulley connected tothe third link. Third link 118 may form an end-effector that may carrypayload 119, for instance, a semiconductor substrate. It should be notedthat the robotic arm of FIG. 1 is shown for exemplary purposes only. Anyother suitable arm mechanism or drive mechanism may be used either aloneor in combination. For example, multiple direct-drive modules accordingto one or more embodiments of this invention may be utilized in a singlerobotic manipulator or a robotic manipulator having multiplemanipulators or any suitable combination. Here, the modules may bestacked in different planes along substantially the same axis ofrotation, located concentrically in substantially the same plane,arranged in a configuration that combines the stacked and concentricarrangements, or incorporated into the robotic manipulator in any othersuitable manner.

The vacuum-compatible direct-drive system of one or more embodiments ofthis invention may comprise a housing and a radial field motorarrangement including a stator and a rotor arranged in the vicinity ofthe stator so that it may rotate with respect to the stator and interactwith the stator through a magnetic field substantially radial withrespect to the axis of rotation of the rotor. Alternatively, an axialfield motor or a combination radial/axial field motor may be provided,or combinations thereof. The stator may include a set of windingsenergized by a suitable controller based on the relative position of therotor with respect to the stator. The rotor may include a set ofpermanent magnets with alternating polarity.

In the embodiment shown, the housing may separate an atmospheric typeenvironment on the outside of the housing from a vacuum or othernon-atmospheric environment inside of the housing. Active components,such as the encoder read head or the stator may be fastened to and/orinterface with the housing as will be described, for example, the readhead or stator may be pressed into or otherwise fastened to the housingto eliminate conventional clamping components and may be encapsulated ina suitable material, such as vacuum compatible epoxy based potting, tolimit out-gassing of the components to the vacuum or othernon-atmospheric environment as will be described. Here, the encapsulatedcomponent may be in vacuum, atmosphere or any suitable environment wherethe encapsulation protects the stator from the environment, e.g.,prevents corrosion, and facilitates efficient heat removal. Theencapsulation may also bond the read head or stator to the housing orother component or sub component, further securing the device withrespect to the housing. The wires leading to the windings or otheractive components of the read head or windings of the stator may passthrough an opening of the housing which is sealed by the encapsulation,thus eliminating the need for a separate vacuum feed-through, forexample, as will be described with respect to FIG. 2. Alternatively, theread head or stator may be clamped, bolted or attached in any othersuitable manner to the housing, and the wires leading from theatmospheric environment to the windings or other active components ofthe read head or the windings of the stator may be routed through avacuum feed-through or passed through the wall of the housing in anyother suitable manner, for example, as described with respect to FIGS.3A-D.

In FIG. 2, feed through 202 is shown interfacing with housing 105 wherehousing 105 may separate a first environment 204 from a secondenvironment 206. Feed through 202 may interface with active component208 where active component 208 may have active core 210 and leads 214.Active core 208 may be encased in closure 212 where closure 212 may be acoating, encapsulation, enclosure or combinations thereof in whole or inpart as will be described. Alternately, closure 212 may not be provided.Leads 214 pass through holes 216 of housing 105 and are isolated fromhousing 105 by potting or isolation material 218. Here material 218 maybe the same as material 212 or may be separately potted or otherwiseisolated where material 218 may seal across a pressure gradient betweenenvironment 204 and 206 or otherwise.

In FIG. 3A, feed through 224 is shown interfacing with housing 105 wherehousing 105 may separate a first environment 204 from a secondenvironment 206. Feed through 224 may interface with active component208′ where active component 208′ may have active core 210′ and leads214′. Active core 208′ may be encased in closure 212′ where closure 212′may be a coating, encapsulation, enclosure or combinations thereof inwhole or in part as will be described. Alternately, closure 212′ may notbe provided. Leads 214′ accept leads 226 that interface withfeedthroughs 228 that pass through holes 216 of housing 105 and areisolated from housing 105 by insulated cores 230 where cores 230 aresealed 232 to housing 105. Here cores 230 have conductive inserts 234hermetically sealed there to where conductive inserts accepts leads 226on a first environment side 204 and further accept leads 236 on a secondenvironment side 206. Here, cores 230 in combination with inserts 234may seal across a pressure gradient between environment 204 and 206 orotherwise. In the embodiment disclosed, active components 208, 208′ maybe any suitable component, for example, a read head, winding or anysuitable active component. Alternately, the pin (insert 234) may besealed with respect to the housing 105, and the insulating material(core 230) may provide guidance and electrical insulation. Alternately,lead 226 and the insert 234 may be a single component, eliminating oneconnection. As will be described, an expandable feed-through may beprovided which can be installed from the outside of housing 105 wherethe design may also accommodate for misalignment due to tolerancesbetween the features in the housing and the features that thefeed-throughs connect to in vacuum.

In FIG. 3B, feed through 240 is shown interfacing with housing 105 wherehousing 105 may separate a first environment 204 from a secondenvironment 206. Here feed through 240 has insulated casing 242 and pins244. Socket 246 is provided coupled to an electrical connection in theactive component in environment 204. Pins 244 are shown sealed tohousing 105 with an o-ring seal where pin 244 has a threaded endallowing coupling to a lug for electrical connection in environment 206.Socket 246 has tapered portion 248 such that insertion of pin 244 intosocket 246 expands socket 246 such that electrical contact is madebetween pin 244 and socket 246 upon insertion and assembly.

In FIG. 3C, feed through 240′ is shown interfacing with housing 105where housing 105 may separate a first environment 204 from a secondenvironment 206. Here feed through 240′ has insulated casing 242′ andpins 244′. Socket 246′ is provided coupled to an electrical connectionin the active component in environment 204. Pins 244′ are shown sealedto housing 105 with an o-ring seal where pin 244′ has a threaded endallowing coupling to a lug for electrical connection in environment 206.Pin 244′ has tapered portion 248′ such that after insertion of pin 244′into socket 246′, rotation of a set screw moves an internal pin of pin244′ to expand pin 244′ such that electrical contact is made between pin244′ and socket 246′ upon assembly.

In FIG. 3D, feed through 240″ is shown interfacing with housing 105where housing 105 may separate a first environment 204 from a secondenvironment 206. Here feed through 240″ has insulated casing 242″ andsockets 244″. Pin 246″ is provided coupled to an electrical connectionin the active component in environment 204. Socket 244″ is shown sealedto housing 105 with an o-ring seal where socket 244″ has a threaded endallowing coupling to a lug for electrical connection in environment 206.Socket 244″ has tapered portion 248″ such that after insertion of socket244″ onto pin 246″, rotation of a screw moves an external sleeve ofsocket 244″ to compress socket 244″ such that electrical contact is madebetween socket 244″ and pin 246″ upon assembly.

In order to determine the angular position of the driven part of thedirect-drive module, e.g., the angular position of the motor rotor withrespect to the housing, a position encoder may be incorporated into thedirect-drive module. A position encoder track may be coupled to thedriven part of the direct-drive module, and a position encoder read-headmay be attached to the housing 105 of the direct-drive module, forexample as seen in FIGS. 4-7. Here, the read head may be optical,inductive, or any suitable type of read head for position determinationor otherwise.

In one exemplary embodiment as seen in FIG. 4, the read-head may have acasing 252 sealed to housing 105 with seal 256 with an active component254 that may be located entirely in the vacuum or other non-atmosphericenvironment inside of the housing.

In another exemplary embodiment as seen in FIG. 5, the read-head mayhave a casing 252′ sealed to housing 105 with seal 256 with an activecomponent 254′ that may be isolated from in the vacuum or othernon-atmospheric environment inside of the housing by casing 252′.

In another exemplary embodiment as seen in FIG. 6, the read-head mayhave a casing 252″ sealed to housing 105 with seal 256 with an activecomponent 254″ that may be partially exposed 258 to the vacuum or othernon-atmospheric environment while another part 260 of the activecomponent of the read-head may be present in the surrounding atmosphericenvironment. In this case, the read-head may be located in an opening inthe housing of the direct-drive module and sealed with respect to thewall of the housing. The seal 256 may be compressible to allow foradjustment of the read-head with respect to the track. Alternatively, anangular-contact, axial or radial contact type of sealing arrangement maybe utilized to provide a larger adjustment range. As anotheralternative, a flexure, membrane or bellows may be employed to allow foradjustment of the read-head with respect to the track.

In another exemplary embodiment as seen in FIG. 7, the read-head mayhave a casing 252″′ sealed to housing 105 with seal 256 with an activecomponent 254″′ that utilizes vacuum-compatible encapsulation, includingthe described encapsulation alternatives and enhancements to minimizethe risk of out-gassing and protects the stator from the environment,e.g., prevents corrosion, and facilitates efficient heat removal, andmay be used or two separation walls 262, 264 may be incorporated, forexample, to isolate different portions 266, 268 of the read head fromone or more environment.

FIG. 8 shows an exemplary read head mounting arrangement. As seen inFIG. 9, the encoder has disk 304 rotationally mounted on axis 306 andread head 302 movably mounted with respect to housing 105 and sealed tohousing 105 with seal 256. Here seal 256 may be an O-ring, flexure orother suitable seal providing read head 302 sufficient movementradially, axially and also angular movement or otherwise with respect todisk 304 and while maintaining a seal, for example, a vacuum seal. Heredisk 304 may be of solid construction of metal with a pattern of linesor spaces for inductive sensing by read head 302 or otherwise. Housing105 has pins 308 that correspond to a mating hole and slot of head 302such that head 302 is positively located with respect to housing 105 anddisk 304 rotationally mounted therein. Screws 310 fasten head 302 tohousing 105 where three set screws 312 allow head 302 to be radiallyadjusted relative to disk 304 and leveled or otherwise adjusted withrespect to disk 304. In this manner, the location of read head 302 withrespect to disk 304 may be adjusted without breaking the vacuumenvironment. In alternate aspects, any suitable locating or levelingfeatures may be provided.

FIG. 11 shows an exemplary read head mounting arrangement. The encoderhas disk 304′ rotationally mounted on axis 306 and read head 302′movably mounted with respect to housing 105 and sealed to housing 105with seal 256. Here seal 256 may be an o-ring, flexure or other suitableseal providing read head 302 sufficient movement radially, axially alsoangular movement or otherwise with respect to disk 304 and whilemaintaining a seal, for example, a vacuum seal. Here disk 304 may be ofopaque construction of glass or otherwise with a pattern of lines orspaces for optical sensing by read head 302′ or otherwise. Housing 105has pins 308 shown in FIG. 10 that correspond to a mating slot of head302′ such that head 302′ is positively located with respect to housing105 and disk 304′ rotationally mounted therein. Screws 310 fasten withvertical slots of head 302′ to housing 105 where three set screws 312allow head 302 to be radially adjusted relative to disk 304 and leveledor otherwise adjusted with respect to disk 304. Eccentrics 314 arefurther provided rotationally coupled to housing 105 and engaging matinghorizontal slots of read head 302′ such that the location of head 302′with respect to disk 304′ may be axially adjusted. In this manner, thelocation of read head 302′ with respect to disk 304′ may be adjustedwithout breaking the vacuum environment. In alternate aspects, anysuitable locating or leveling features may be provided.

FIGS. 12-19 show various combinations of separation walls with respectto motor 108. Here, as will be described, the separation wall may forman encapsulation, separation, vacuum or gas barrier, for example, toisolate two or more areas or environments. Here motor 108 is shown inpartial section and may be exemplary where in alternate embodiments, anysuitable motor, combination of motors and/or combination of separationwall(s) may be provided. In FIG. 12, motor 108 has stator 352 and rotor354 each of which may have any suitable combination of core(s),magnet(s), winding(s) or otherwise. Separation wall 356 may be a thinwalled tubular metal structure that separates environment 204 from thatof environment 206 and separates rotor 354 from stator 352. Alternately,separation wall 356 may be a coating, plating, molded portion, formedportion and having any shape or any suitable separation wall orcombination of separation wall(s) and wall type(s). Further, separationwall 356 may be integrally formed as part of housing 105 or may beseparate from housing 105.

In FIG. 13, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206and separates rotor 354 from stator 352. Separation wall 358 may furtherbe a thin walled tubular metal structure that separates environment 204from that of environment 206. Alternately, separation walls 356, 358 maybe any suitable shape, for example separation walls 356, 358 may form apartial or complete enclosure enclosing stator 352 such that a thirdenvironment 360 within the enclosure is formed isolated from environment204 and/or environment 206. Alternately walls 356, 358 may be a coating,plating, molded portion, formed portion having any shape or any suitableseparation wall or combination of separation wall(s) and wall type(s).Further, one or more of separation wall 356, 358 may be integrallyformed as part of housing 105 or may be separate from housing 105.

In FIG. 14, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206.Alternately, separation wall 356 may be a coating, plating, moldedportion, formed portion and having any shape or any suitable separationwall or combination of separation wall(s) and wall type(s). Further,separation wall 356 may be integrally formed as part of housing 105 ormay be separate from housing 105.

In FIG. 15, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206where stator 352 is exposed to both environment 204 and 206 and forms aportion of wall 356. Alternately, separation wall 356 may be a coating,plating, molded portion, formed portion and having any shape or anysuitable separation wall or combination of separation wall(s) and walltype(s). Further, separation wall 356 may be integrally formed as partof housing 105 or may be separate from housing 105.

In FIG. 16, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206where stator 352 is exposed to both environment 204 and 206 with aportion of wall 356 separating a portion 362 of stator 352 from anotherportion 364 of stator 352. Alternately, separation wall 356 may be acoating, plating, molded portion, formed portion and having any shape orany suitable separation wall or combination of separation wall(s) andwall type(s). Further, separation wall 356 may be integrally formed aspart of housing 105 or may be separate from housing 105.

In FIG. 17, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206where stator 352 is exposed to both environment 204 and 206 with aportion of wall 356 separating a portion 366 of stator 352 from anotherportion 368 of stator 352. Alternately, separation wall 356 may be acoating, plating, molded portion, formed portion and having any shape orany suitable separation wall or combination of separation wall(s) andwall type(s). Further, separation wall 356 may be integrally formed aspart of housing 105 or may be separate from housing 105.

In FIG. 18, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206and separates rotor 354 from a portion of stator 352. Separation wall358 may further be a thin walled tubular metal structure that separatesenvironment 204 from that of environment 206. Alternately, separationwalls 356, 358 may be any suitable shape, for example separation walls356, 358 may form a partial or complete enclosure enclosing stator 352such that a third environment 360 within the enclosure is formedisolated from environment 204 and/or environment 206. Stator 352 isshown having a first portion 370 in environment 204, second portion 372in environment 360 and third portion 374 in environment 206. Alternatelywalls 356, 358 may be a coating, plating, molded portion, formed portionhaving any shape or any suitable separation wall or combination ofseparation wall(s) and wall type(s). Further, one or more of separationwall 356, 358 may be integrally formed as part of housing 105 or may beseparate from housing 105.

In FIG. 19, motor 108 has stator 352 and rotor 354 each of which mayhave any suitable combination of core(s), magnet(s), winding(s) orotherwise. Separation wall 356 may be a thin walled tubular metalstructure that separates environment 204 from that of environment 206where stator 352 is exposed to both environment 204 and 206 and forms aportion of wall 356. Separation wall 358 may be a thin walled tubularmetal structure that separates environment 204 from that of a portion ofstator 352 where stator 352 is exposed to both environment 204 and 206and forms a portion of wall 356. Alternately, separation wall 356 may bea coating, plating, molded portion, formed portion and having any shapeor any suitable separation wall or combination of separation wall(s) andwall type(s). Further, separation wall 356 may be integrally formed aspart of housing 105 or may be separate from housing 105. In alternateaspects, one or more of the features may be combined, for example, oneor more of the features of embodiments of FIGS. 12-23 may be combined inany suitable arrangement or combination.

FIG. 20 shows an example of a stator 352 and rotor 354. Stator 352 mayhave a toothed (slotted) iron core, which may provide desirably hightorque constant and efficiency. Alternately, stator 352 of thevacuum-compatible drive module may be of a toothless (slotless) design,which may provide desirably low level of cogging. Alternatively, stator352 of the vacuum-compatible drive module may be of an ironless(coreless) design. Alternately, rotor 354 and stator 352 may be anysuitable rotor or stator. Stator 352 may be encapsulated withencapsulation 402 that may be vacuum compatible epoxy with a filler orany suitable encapsulation. The encapsulation may completely orpartially surround and encapsulate stator 352. For example, a metal orany other suitable material that for example has good heat transfer orother desired properties forming ring 404 may be provided in contactwith housing 105 while a portion (or none) of encapsulation 402 is ormay also be in contact with housing 105. Alternately, encapsulation 402may not be in contact with housing 105, for example, where stator 352,ring 404 and encapsulation 402 may be formed as a discrete assembly andsubsequently installed in housing 105. Here stator 352 may have ring 404pressed or otherwise fastened there on and being subsequently pottedwith encapsulation 402. Encapsulation 402 may be performed by evacuatinga mold with stator 352 and/or ring 404 therein and introducing a liquidresin therein to form the external envelope of encapsulation 402. Here,a portion of the ring, stator or other suitable component may or may notform a portion of the mold. Alternately and as will be shown, anintegral enclosure may form the mold all or in part that defines thevolume of the encapsulation. When formed as an assembly independent ofhousing 105, the assembly 352, 404, 402 may then be assembled to housing105 by a press fit or other suitable fastening. Here, heat may betransferred from the windings and laminations or core of stator 352 andthrough encapsulation and/or ring 404 to be dissipated through housing105. Here, for example, stator 352 may have pressed or otherwisefastened by fasteners, adhesive or otherwise fastened ring 404 incontact with housing 105 where fastening the ring to the stator and/orhousing is such that that there is sufficient contact with the statorand/or the housing to provide a sufficient heat transfer path from thestator to the ring and to the housing or other sinking source.Encapsulation 402 may be integrally molded with housing 105 and stator352 or separately molded, for example as an assembly with stator 352,ring 404 as an assembly to be installed in housing 105 as described orotherwise. Ring 404 may further have axial holes 424 and trapezoidalcuts 420 formed to facilitate bonding of encapsulation 402 andresolution of internal stresses such as due to thermal expansion of thepotting material. Here, the function of the ring 404 may be to provide apath to remove heat from the stator 352 and transfer it to the housing105, which may be cooled, for example, externally or otherwise cooled,while keeping a continuous protection barrier around the stator, forexample, where a stator may be formed from laminates, ring 404 forms acontinuous protection barrier as compared to non continuous laminations.Alternately, encapsulation 402 and housing 105 may be made of the samematerial, for example, where housing 105 and encapsulation 402 aremolded as a unitary structure with stator encapsulated in whole or inpart there in a unitary material 105 and 402. Here, encapsulation 402may form a separation barrier and may provide protection from theenvironment, e.g., to prevent corrosion, and/or facilitate heat removalas previously described. Although FIG. 20 shows ring 404 used in variouscombinations with stator 352, encapsulation 402 and housing 105,alternately, encapsulation 402 may apply to embodiments with or withoutthe ring, housing 105 or otherwise as a unitary structure with orwithout another component or otherwise. Accordingly, all such variationsare embraced.

As shown in FIG. 21, the exposed surfaces of the stator encapsulation402 of the vacuum-compatible direct-drive module may be coated eithercompletely or in part with coating 406, e.g., utilizing electrolessnickel plating, to eliminate or minimize exposure of the pottingmaterial used for the encapsulation of the stator to the vacuum,atmospheric, sub-atmospheric, pressurized, or other non-atmosphericenvironment to further reduce the risk of out-gassing. Here, coating 406may form a separation barrier as previously described. Alternatively, asseen in FIG. 22, one or more thin sheets of protective material 408,410, 412, e.g., made of stainless steel or another suitable material,may be bonded to the encapsulation of the stator, for example, in thepotting process, as shown in FIG. 22. This may limit the exposure of thepotting material to the seams between the thin sheets of protectivematerial. Here, potting material 402 may form a seal between sheets 408,412, 410 or the sheets may be otherwise sealed, for example, by welding,brazing, soldering or with any suitable static seal, such as o-rings orotherwise. Here, sheets 408, 410, 412 and ring 404 may form a separationbarrier as previously described. Here, the stator may be enclosed in athin cage or enclosure bonded to the potting material, for example, inthe potting process. The thin cage or enclosure may be, e.g., weldedfrom thin sheets of stainless steel.

In FIG. 23, an enclosure, for example of machined or otherwise formedaluminum or stainless steel or other suitable material is providedhaving sleeve 414, lower casing 416 and upper casing 418. Each may besealed by potting 402 or otherwise sealed, for example, by welding,brazing, soldering or with any suitable static seal, such as o-rings orotherwise. Here, potting 402 may not be provided and where the interiorvolume of the casing may form an intermediate environment, for example,environment 360 or otherwise. Alternately, more or less or partialcasing(s) may be provided, for example, where the windings of a statorare potted but the teeth are not or otherwise. Here, a small gap may beprovided between the stator and the rotor, which preserves the torqueoutput and efficiency of conventional motor designs. Here, withradial-field motors, a separation layer may be incorporated into thestator(s), for example, by the means of coating, bonding or by any othersuitable method. As another alternative, the stator(s) may be molded orotherwise packaged in a material compatible with and resistant to vacuumor any other environment the stator(s) may be subject to. As a furtheralternative, the stator may be encapsulated in a vacuum tight vessel asseen in FIG. 23. Similarly, the rotor may be coated, carry a bondedprotection layer, molded or packaged in a protective material,encapsulated in a vacuum tight vessel or otherwise protected from theenvironment it may operate in.

The exposed surfaces of the stator encapsulation may be coated, forexample, as in FIG. 21, e.g., utilizing electroless nickel plating, toeliminate or minimize exposure of the potting material used for theencapsulation of the stator to the vacuum or other non-atmosphericenvironment to further reduce the risk of out-gassing. Alternatively,thin sheets of protective material, for example, as seen in FIG. 22,e.g., made of stainless steel, may be bonded to the encapsulation of thestator, preferably in the potting process, as shown in FIG. 22. Thislimits the exposure of the potting material to the seams between thethin sheets of protective material. As another alternative, as shown inFIG. 23, the stator may be enclosed in a thin enclosure bonded to thepotting material, preferably in the potting process. The enclosure maybe, e.g., welded from thin sheets of stainless steel. As yet anotheralternative, a thin separation wall, for example, in the form of a disk412, may be present between the stator and rotor of the axial-fieldmotor. The stator may be pressed, bonded, clamped, bolted or attached inany other suitable manner to the housing of the direct-drive module asseen in FIG. 20.

The above described radial, axial or combination radial-axial-fieldmotor may be of coreless (ironless) design. In another exampleembodiment with a motor arrangement, a coreless stator with windings andtwo rotors with magnets, each rotor on one side of the stator, may beutilized. Alternatively, the stator may include an iron core as thepassive magnetic forces exerted on the iron core by the two rotors maybe balanced. Yet another example embodiment with a motor arrangement mayinclude two stators with windings and a single rotor with magnetssandwiched between them. Vacuum-compatible encapsulation, including theabove described encapsulation alternatives and enhancements to minimizethe risk of out-gassing and/or enhance heat transfer, may be used or twoor more separation walls may be incorporated into these exampleembodiments as described.

In another embodiment of the vacuum-compatible direct-drive system ofthis invention, the motor configuration(s) utilized in the aboveexamples may be replaced by a different motor topology, includingwithout limitation a hybrid-field (radial-axial) configuration. Forinstance, the stator(s) and rotor(s) may feature a conical, convexv-shaped, concave v-shaped, convex semicircular or concave semicircularprofile, any combination of conical, v-shaped and semicircular profiles,or any other suitable profile, resulting in a substantially uniform gapor gaps between the stator(s) and rotor(s). Vacuum-compatibleencapsulation, including the above described encapsulation alternativesand enhancements to minimize the risk of out-gassing, may be used, or aseparation wall of a suitable shape may be present in the gap(s).Outer-stator-inner-rotor and inner-stator-outer-rotor configurations maybe used. In an alternate embodiment, the entire housing 105 may beformed or otherwise molded where the stator may be incorporated directlyinto the molded housing. As an alternative to molding, casting or sprayforming or any suitable fabrication of any suitable alternative materialmay be provided. In alternate embodiments, any suitable number ofwinding phases, distributed or otherwise may be provided within thestator. In alternate embodiments, for example, with respect to thepassive magnetless rotor or any suitable rotor described, the rotor maynot be solid, for example, where the rotor is laminated in some fashionbut vacuum compatible to reduce losses.

As seen in FIG. 24, the vacuum-compatible direct-drive system may employa radial field motor arrangement 108 including a wound brushless stator352 and a rotor 354 with magnets 452 arranged in the vicinity of thestator so that it may rotate with respect to the stator and interactwith the stator through a magnetic field substantially radial withrespect to the axis of rotation 306 of the rotor. The stator may havewindings 454, core 456 and backing ring 404. Alternately, stator 352 maybe coreless where the coreless stator may consist of a set of windingsenergized by a suitable controller based on the relative position of therotor with respect to the stator. The rotor 354 may include a set ofpermanent magnets 452 with alternating polarity. As described, thestator may be encapsulated in a suitable material, such as vacuumcompatible epoxy based potting, to limit out-gassing of the statorcomponents to the vacuum or other non-atmospheric environment. Theencapsulation may also bond the stator to the housing of thedirect-drive module, further securing the stator with respect to thehousing as seen in FIG. 20. The wires leading to the windings of thestator may pass through an opening of the housing which is sealed by theencapsulation as seen in FIG. 2, thus eliminating the need for aseparate vacuum feed-through as seen in FIG. 3. Alternatively, the wiresleading from the atmospheric environment to the windings of the statorof the radial field motor may be routed through a vacuum feed-through orpassed through the wall of the housing of the direct-drive module in anyother suitable manner.

As seen in FIG. 25, motor 108 may be motor 108′ that may be a hybriddesign having toothed passive rotor 458, stator phase A 460 and statorphase B 462 separated by ring permanent magnet 464. A suitable examplemay be found in U.S. Pat. No. 5,834,865 entitled “Hybrid Stepping Motor”which is hereby incorporated by reference in its entirety. Alternately,the ring magnet may be provided within rotor 458. As shown, a solid nonmagnetic passive rotor, for example, not containing permanent magnetsand having high permeability/saturation and low coercivity, for example,of 400 series stainless steel having no magnets may be provided toreduce outgassing where the stator portion(s) may be provided with oneor more separation walls as previously described. Such arrangementminimizes exposed materials to vacuum, for example, where the magnetsare not exposed to vacuum. Similarly, such a nonmagnetic passive rotor,not containing permanent magnets, may be used in combination with anysuitable stator, such as any of the exemplary embodiment stators orotherwise disclosed embodiments.

As seen in FIG. 26, motor 108 may be motor 108″ that may be an axialfield design having rotor 470 with magnets 472, and stator 474 with core476 and windings 478. Alternately, the magnets may be provided withinthe stator.

As seen in FIG. 27, motor 108 may be motor 490 that may be a brushlessdesign having a passive rotor 494 and stator 492 as will be described ingreater detail. Here stator 492 may have core 496 (solid or laminated),windings 498 and magnets 500. As shown, a solid non-magnetic passiverotor as described, for example, of 400 series stainless steel having nomagnets may be provided to reduce outgassing where the stator portion(s)may be provided with one or more separation walls as previouslydescribed. Such arrangement minimizes exposed materials to vacuum, forexample, where the magnets are not exposed to vacuum. Similarly, such anonmagnetic passive rotor, not containing permanent magnets, may be usedin combination with any suitable stator, such as any of the exemplaryembodiment stators or otherwise disclosed embodiments.

As seen in FIGS. 28 and 29, motor 502 is provided having featuressimilar to that shown in FIG. 27. A liner variant may be found in U.S.Pat. No. 7,800,256 entitled “Electric Machine” which is herebyincorporated by reference in its entirety. Motor 502 has stator 504 andtoothed passive rotor 506. Rotor 506 may be 400 series stainless steelor any suitable material that can channel the magnetic flux from stator504 but without permanent magnets. Stator 504 may be separated fromrotor 506 by one or more separation walls 508, 510 as previouslydescribed where walls 508, 510 may be 300 series stainless steel,aluminum or other suitable material that allows field interactionbetween rotor 506 and stator 504. Stator 504 has salient windings 512 onteeth 514 with two alternating magnets 516, 518 on each tooth and wheremagnets on adjacent teeth have matching polarity with respect to thetooth as shown. Alternately, distributed windings may be provided. Fluxis selectively directed by a given winding to one of the two magnets onthe tooth depending on the polarity of the winding. Flux is directedfrom each tooth through the teeth on the rotor to and adjacent tooth ofthe stator to selectively commutate the motor. In alternate aspects, anysuitable motor having a non magnetic passive rotor may be provided.

As seen in FIGS. 30 and 31, motor 552 is provided having featuressimilar to that shown in FIGS. 27, 28 and 29. Motor 552 has stator 554and toothed passive rotor 556. Rotor 556 may be 400 series stainlesssteel or any suitable material that can channel the magnetic flux fromstator 554 but without permanent magnets. Stator 554 may be separatedfrom rotor 556 by one or more separation walls 558, 560 as previouslydescribed where walls 558, 560 may be 300 series stainless steel,aluminum or other suitable material that allows field interactionbetween rotor 556 and stator 554. Stator 554 has salient tangentiallywound windings 562 between teeth 564 with two alternating magnets 566,568 on each tooth and where magnets on adjacent teeth have matchingpolarity with respect to the tooth as shown. Alternately, distributedwindings may be provided. Flux is selectively directed by a givenwinding to one of the two magnets on the tooth depending on the polarityof the winding. Flux is directed from each tooth through the teeth onthe rotor to and adjacent tooth of the stator to selectively commutatethe motor. In alternate aspects, any suitable motor having a nonmagnetic passive rotor may be provided.

As seen in FIGS. 32 and 33, motor 602 is provided having featuressimilar to that shown in FIG. 27. A similar device may be found in U.S.Pat. No. 7,898,135 entitled “Hybrid Permanent Magnet Motor” and U.S.Patent Publication No. 2011/0089751 A1 entitled “Parallel MagneticCircuit Motor” both of which are hereby incorporated by reference in itsentirety. Motor 602 has stator 604 and toothed passive rotor 606. Rotor606 may be 400 series stainless steel or any suitable material that canchannel the magnetic flux from stator 604 but without permanent magnets.Stator 564 may be separated from rotor 606 by one or more separationwalls 608, 610 as previously described where walls 608, 610 may be 300series stainless steel, aluminum or other suitable material that allowsfield interaction between rotor 606 and stator 604. Stator 604 hassalient tangential windings 612 on core 614, with each core having twoteeth and with two alternating magnets 616, 618 on each core and wheremagnets on adjacent cores have opposing polarity with respect to thecore as shown. Alternately, distributed windings may be provided. Fluxis selectively directed by a given winding to one of the two teeth onthe core depending on the polarity of the winding. Flux is directed fromeach tooth through the teeth on the rotor to an adjacent tooth of thestator to selectively commutate the motor. In alternate aspects, anysuitable motor having a non magnetic passive rotor may be provided.

As seen in FIGS. 34 and 35, motor 652 is provided having featuressimilar to that shown in FIG. 27. A liner variant may be found in U.S.Pat. No. 7,800,256 entitled “Electric Machine” which is herebyincorporated by reference in its entirety. Motor 652 has stator 654 andtoothed passive rotor 656. Rotor 656 may be 400 series stainless steelor any suitable material that can channel the magnetic flux from stator504 but without permanent magnets. Stator 654 may be separated fromrotor 656 by one or more separation walls 658, 660 as previouslydescribed where walls 658, 660 may be 300 series stainless steel,aluminum or other suitable material that allows field interactionbetween rotor 656 and stator 654. Stator 654 has salient windings 662 onteeth 664 with two alternating magnets 666, 668 on opposing sides of thecore of each tooth and where magnets on cores of adjacent teeth haveopposing polarity with respect to the tooth as shown. Alternately,distributed windings may be provided. Flux is selectively directed by agiven winding to the tooth depending on the polarity of the winding.Flux is directed from each tooth through the teeth on the rotor to andadjacent tooth of the stator to selectively commutate the motor. Inalternate aspects, any suitable motor having a non magnetic passiverotor may be provided.

As seen in FIGS. 36 and 37, motor 702 is provided having featuressimilar to that shown in FIG. 27. A liner variant may be found in U.S.Pat. No. 7,800,256 entitled “Electric Machine” which is herebyincorporated by reference in its entirety. Motor 702 has stator 704 andtoothed passive rotor 706. Rotor 706 may be 400 series stainless steelor any suitable material that can channel the magnetic flux from stator504 but without permanent magnets. Stator 704 may be separated fromrotor 706 by one or more separation walls 708, 710 as previouslydescribed where walls 708, 710 may be 300 series stainless steel,aluminum or other suitable material that allows field interactionbetween rotor 706 and stator 704. Stator 704 has salient windings 712 onsplit teeth 714 with a magnet 716 splitting each tooth and where magnetson adjacent teeth have opposing polarity with respect to the tooth asshown. Alternately, distributed windings may be provided. Flux isselectively directed by a given winding to one of the two split portionsof the tooth depending on the polarity of the winding. Flux is directedfrom each tooth through the teeth on the rotor to and adjacent tooth ofthe stator to selectively commutate the motor. In alternate aspects, anysuitable motor having a non magnetic passive rotor may be provided.

An example substrate transport apparatus may comprise a drive sectioncomprising a first motor, where the first motor comprises a stator and apassive rotor; and a first movable arm assembly connected to the firstmotor. The substrate transport apparatus may be configured for the firstmovable arm assembly to be positionable in a vacuum chamber 4 (seeFIG. 1) with the passive rotor being in communication with anenvironment inside the vacuum chamber.

The first motor may be a radial field motor arrangement. The stator maycomprise a coil and a permanent magnet. The passive rotor may compriseno coil and no permanent magnet. The passive rotor may comprise astainless steel one piece member. The first motor may be a linear motorarrangement. The passive rotor may comprise a tooth surface facing thestator. The substrate transport apparatus may further comprise a gasbarrier located between the stator and the passive rotor to separate theenvironment at the passive rotor (environment in chamber 4 and extendinginto the motor region of the drive 10) from an environment at the stator(such as atmospheric 6). The gas barrier may comprise at least oneseparation wall. The separation wall may comprise a stainless steel, oraluminum, or other material that allows magnetic field interactionbetween the passive rotor and the stator. The gas barrier may comprise ahousing surrounding substantially entirely around the stator. Thehousing may comprise an encapsulation material surrounding the stator.The encapsulation material may comprise an overmolded polymer materialwhich has been molded onto the stator.

An example method may comprise providing a substrate transport apparatuscomprising a drive section and a first movable arm assembly connected tothe drive section, where the drive section comprises a motor comprisinga stator and a passive rotor; and connecting the substrate transportapparatus to a vacuum chamber, where the first movable arm assembly ispositioned in the vacuum chamber with the passive rotor being incommunication with an environment inside the vacuum chamber.

Providing the substrate transport apparatus comprises the stator mayinclude a coil and a permanent magnet, and the passive rotor may have nocoil and no permanent magnet. The method may further comprise locating agas barrier between the stator and the passive rotor to separate theenvironment at the passive rotor from an environment at the stator. Thegas barrier may comprise at least one separation wall being locatedbetween the stator and the passive rotor. The gas barrier may compriseencapsulating the stator with an encapsulation material. The gas barriermay comprise enclosing the stator inside an enclosure, where a wall ofthe enclosure is located in a gap between the stator and the passiverotor.

An example substrate transport apparatus may comprise a drive sectioncomprising a first motor, where the first motor comprises a stator and apassive rotor; a first movable arm assembly connected to the firstmotor; and a gas barrier located in a gap between the stator and thepassive rotor to separate an environment at the passive rotor from anenvironment at the stator.

It should be understood that the foregoing description is onlyillustrative. Various alternatives and modifications can be devised bythose skilled in the art. For example, features recited in the variousdependent claims could be combined with each other in any suitablecombination(s). In addition, features from different embodimentsdescribed above could be selectively combined into a new embodiment.Accordingly, the description is intended to embrace all suchalternatives, modifications and variances which fall within the scope ofthe appended claims.

What is claimed is:
 1. An apparatus comprising: a motor housing configured to form a first environmental area inside the motor housing separated from a second environmental area outside of the motor housing, where the motor housing comprises electrical connector apertures through the motor housing; a plurality of first electrical connectors, where each of the first electrical connectors comprise a projecting pin section; a plurality of second electrical connectors, where each of the second electrical connectors comprise a socket section configured to receive the projecting pin section of a respective one of the first electrical connectors; and a casing configured to mount to the motor housing, where the casing is configured to press the first electrical connectors or the second electrical connectors against respective seals at respective ones of the electrical connector apertures to seal the electrical connector apertures, where the first electrical connectors contact the respective seals and project through the respective seals, where the projecting pin sections of the first electrical connectors are located in the socket sections of the second electrical connectors forming an interference fit therebetween to thereby connect the first and second electrical connectors.
 2. An apparatus as in claim 1 where electrical insulating material is located in the electrical connector apertures to electrically insulate the first electrical connectors from the motor housing.
 3. An apparatus as in claim 1 where the first electrical connectors each have a lug connected by threads thereto.
 4. An apparatus as in claim 1 where the first electrical connectors each have a side projection which is received in a pocket of the casing which the casing presses against to press the first electrical connectors against respective seals.
 5. An apparatus as in claim 1 where the seals are located in the electrical connector apertures at seal receiving pockets of the motor housing.
 6. An apparatus as in claim 1 where the second electrical connectors are located, at least partially, in portions of the electrical connector apertures.
 7. An apparatus as in claim 1 where the projecting pin sections are configured to expand the socket sections when the projecting pin sections are positioned into the socket sections.
 8. An apparatus as in claim 1 further comprising means for increasing the interference fit between the projecting pin sections and the socket sections.
 9. An apparatus as in claim 8 where the means for increasing the interference fit between the projecting pin sections and the socket sections comprises a tapered section of the socket section.
 10. An apparatus comprising: a motor housing configured to form a first environmental area inside the motor housing separated from a second environmental area outside of the motor housing, where the motor housing comprises a plurality of electrical connector apertures through the motor housing; a plurality of first electrical connectors, where each of the first electrical connectors comprise a projecting pin section; a plurality of second electrical connectors, where each of the second electrical connectors comprise a socket section configured to receive the projecting pin section of a respective one of the first electrical connectors; and a casing configured to press the first electrical connectors against respective seals at the electrical connector apertures to seal the electrical connector apertures, where the first electrical connectors project through the respective seals, where the projecting pin sections of the first electrical connectors are located in the respective socket sections of the second electrical connectors with a press-fit therebetween to thereby connect the first and second electrical connectors.
 11. An apparatus as in claim 10 where electrical insulating material is located in the electrical connector apertures to electrically insulate the first electrical connectors from the motor housing.
 12. An apparatus as in claim 10 where the first electrical connectors each have a lug connected by threads thereto.
 13. An apparatus as in claim 10 where the first electrical connectors each have a side projection which is received in a pocket of the casing, where the casing presses against the side projection at the pocket to press the first electrical connectors against respective seals.
 14. An apparatus as in claim 10 where the seals are located in seal receiving pockets of the electrical connector apertures.
 15. An apparatus as in claim 10 where the second electrical connectors are located, at least partially, in portions of the electrical connector apertures.
 16. An apparatus as in claim 10 where the projecting pin sections are configured to expand the socket sections when the projecting pin sections are positioned into the socket sections.
 17. An apparatus as in claim 10 further comprising means for increasing the interference fit between the projecting pin sections and the socket sections.
 18. An apparatus as in claim 17 where the means for increasing the interference fit between the projecting pin sections and the socket sections comprises a tapered section of the socket section.
 19. A method comprising: inserting first electrical connectors into electrical connector apertures in a motor housing; pressing projecting pin sections of the first electrical connectors into socket sections of respective second electrical connectors at the electrical connector apertures, where the second electrical connectors are located at least partially in the electrical connector apertures, and where the projecting pin sections form an interference fit connection with the respective socket sections of the second electrical connectors to thereby electrically connect the first and second electrical connectors; pressing at least one group of either the first electrical connectors or the second electrical connectors towards the motor housing by a casing to thereby press the electrical connectors of the at least one group against respective seals in the electrical connector apertures, where the seals are located in seal receiving pockets of the electrical connector apertures, where the seals are compressed between the at least one group of electrical connectors and the motor housing to seal the electrical connector apertures. 